In-situ Optical Tomographic Diagnostics (B2.1)

The goal of this project is to tomographically reconstruct 3D nanostructures in-situ during the laser printing process, i.e., before development. Our approach is based on stacks of widefield optical intensity interference images taken during printing that are then fed into a trained deep neural network to arrive at a reconstruction. The latter is performed in close collaboration with Research Area D.